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| Wafer | φ300 mm, φ200 mm , φ150 mm, φ125 mm, φ100 mm |
| Carrying Cassette | Standard cassette / Open Cassette / FOUP |
| Processing Cassette | PFA cassette / Cassette-less |
| Number of Wafers | 13, 25, 50 wafers/batch |
| Chemical tanks | APM, SPM, HPM, HF, BHF, H3PO4 |
| Dryer | Spin Dryer / IPA Vapor Dryer / IPA Dryer |
| Operation | Full automatic / Semi automatic |
| Option | Wafer transfer / Half pitch |
| Basic Specifications |
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