Wafer
Σ200 mm , Σ150 mm, Σ125 mm, Σ100 mm
Carrying Cassette
Standard cassette
Processing Cassette
PFA cassette
Number of Wafers
13, 25, 50 wafers/batch
Chemical tanks
APM, SPM, HPM, HF, BHF, H
3
PO
4
Basic Specifications
