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| Wafer | φ300 mm, φ200mm , φ150mm |
| Carrying Cassette | Standard cassette / Open Cassette / FOUP |
| Processing Cassette | None (Carrier-less) |
| Number of Wafers | 13, 25, 50 wafers/batch |
| Chemical tanks | APM, HF |
| Dryer | IPA dryer |
| Operation | Full automatic / Semi automatic |
| Basic Specifications |
