 |
|
| Wafer | φ300 mm, φ200mm , φ150mm |
| Carrying Cassette | Standard cassette / Open Cassette / FOUP |
| Processing Cassette | PFA cassette |
| Number of Wafers | 13, 25 wafers/batch |
| Chemical tanks | HF (Single Dip), APM (Batch Dip) |
| Dryer | IPA dryer (Batch) |
| Operation | Full automatic / Semi automatic |
| Basic Specifications |
