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|
| Wafer | φ300 mm, φ200mm , φ150mm |
| Carrying Cassette | Standard cassette / Open Cassette / FOUP |
| Processing Cassette | None |
| Number of Wafers | 1 wafer/batch |
| Chemical tanks | Mixed Chemical (Dip), HF, O3 (Spin) |
| Dryer | Spin processor |
| Operation | Full automatic / Semi automatic |
| Basic Specifications |
