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| Wafer | φ300 mm,φ 200mm , φ150mm |
| Carrying Cassette | Open Cassette / FOUP / Standard Cassette |
| Processing Cassette | None (Carrier-less) |
| Number of Wafers | 1 wafer/batch |
| Chemical tanks | APM, SPM, HPM, HF, BHF, H3PO4 |
| Dryer | IR Lamp heating |
| Operation | Full automatic / Semi automatic |
| Basic Specifications |
