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Chemical Supply Unit

Chemical Supply Unit

The Main control box can monitor all the chemical liquid supply units, as well as command to transfer chemical liquid from the central unit to the unit installed on the manufacturing equipment by receiving a request signal from the manufacturing equipment.


Central Unit

  • Capacity; 100ℓ~400ℓof liquid
  • Installation of storage tank and canister for emergency.
  • CC link is available.

Unit Equipped With Manufacturing Equipment

  • Capacity: approximately 18ℓ~100ℓof liquid

Variety of Accessories

  • Main control box to monitor all the chemical liquid supply units.
  • Sub-monitor to monitor the units, every room and every floor.
  • Valve box for diverging supply to several units.

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