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Quartz Tube Cleaner

Quartz Tube Cleaner

Cleaning equipment that can full-automatically clean quartz tubes in size of up to 300mm that are used in the diffusion process or CVD process. Vertical type quartz tube cleaning equipment is also available, which succeeded in saving of liquid consumption.


Environmental impact reduction

  • Decrease of chemical consumption by rotation function.

Safety considerations

  • Installation of automatic open/close tank cover designed to prevent chemical diffusion to the atmosphere.

Customized as you need

  • Designed and fabricated to meet your applications and needs.


Types Quartz Tube Cleaner
Objected product for all
Correspondent wafer ⁄ work Quartz Tube Cleaning Equipment for ø150 to ø300mm

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