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IPA Vapor Dryer

IPA Vapor Dryer

Features

Drying equipment with high performance for complicated wafer pattern

  • It enables highly accurate drying of complicated shape pattern of MEMS and LED devices.
  • Sticking problem, likely to appear on a pattern deeply recessed, can be separately solved.

Fire extinguishing system taken account of safety

  • Mounting the automatic fire extinguishing system conforminmg to SEMI standards, in addition to CO2 gas environment oriented "Algonite gas" is also selectable.

Strong control against sticking of particles

  • Strong control against sticking of particles : Not more than 10 particles in size of 0.2µm or more

Specifications

Types IPA Replacement dryer
Objected product MEMS, LED, and other devices
Correspondent wafer ⁄ work ø4inch ~ ø8inch
Correspondent work thickness 200µm~725µm
Clean level Particle : Not more than 10 particles in size of 0.2µm or more
Processing unit 25 pcs.
Dry method IPA Replacement
Option
  • Fire extinguishers
  • Control of IPA concentration in the drain fluid

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